Specification

 Operational     TSC-200    TSC-210   TSC-220  TSC-230 

Full-Scale Ranges   0~7 sccm0sccm~1,5slm0~30 slm0~100 slm 

(N2 Equivalent)

Accuracy      ≤ ±1% of Full Scale 

Response Time  ≤ 2.0sec Linearity≤ ±0.2% of Full Scale 

Repeatability     ≤ ±0.2% of Full Scale 

Leak Integrity      1x10-8Pa· m3/sec (He) 

Control Range         2~100% of Full Scale 

Diffrential Pressure 10kPa ~ 5MPa (Selectable) 

Max Operating Pressure      1.0/2.5/5.0/10MPa (Selectable)  

Proof Pressure 2     .5/5.0/10/15MPa (Selectable)  

Temperature    0~50°C (accuracy guaranteed between 15 and 35°C)

 Control Valve Type     Normally-closed, Normally-open Solenoid 

Seals      Rubber, Metal (Selectable) 

Materials      SUS316L, Viton, Kalrez 

Standard Fittings     Swagelok, VCR 

Connection Type    D-SUB 9Pin 

Input Power       +15VDC ± 5% or +24VDC ± 5% 

Input Signal        0~5VDC or 4~20mA 

Output Signal       0~5VDC or 4~20mA